Products
Silicon sensors for fine pressure
The SC sensor is a differential fine pressure sensor to detect the pressure by the change in capacitance between the diaphragm and the electrode.
Ceramic capacitive sensors for low pressure
The CC sensor is a low pressure sensor whichn detects the pressure by sensing the capacity change 2 electrods.
Semiconductor strain gauge sensor for high pressure
This semiconductor strain gauge sensor, a strain gauge is deposited by plasma CVD on a metallic diaphragm and on insulator film.
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Clean room and ultrapure facilities design, engineering and consulting special for microelectronics, pharmaceutical, medical and biotechnologies applications.
Chemical sensor and /biosensors
• Chemoresistive sensors for CO2 si CH4 detection
• Calorimetric sensors for combustible gases detection as metan and specific components.